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Sulsa and Chips
Department of Chemistry
Colorado State University
Fort Collins, CO 80523
FAX: (970) 491-1801

X-ray Photoelectron and Auger Electron Spectroscopy

X-ray Photoelectron Spectroscopy (XPS) is an extremely powerful surface sensitive technique used to semi-quantitative and qualitative analysis of thin film and powder samples.

The 5800 is the latest member of the 5000 series of Multi-Technique ESCA systems. The hemispherical analyzer and electrostatic input lenses used in the 5000 series have provided unsurpassed basic XPS capability: unequaled accuracy of quantification, high energy resolution, high sensitivity, and excellent angular resolution. To serve the diverse needs of research and materials science laboratories, an array of standard accessories is available for the 5800.

XPS


Some important features of our 5800 system are:

  • Most accurate quantitative chemical state analysis of surfaces

  • Superior thin film characterization (sputter depth profiling)

  • Superior angle dependent analysis (non-destructive depth profiling)

  • Effortless analysis of electrically insulating samples

  • Achromatic ESCA with dual anode x-ray source

  • Monochromatic ESCA for superior energy resolution

  • Scanning Auger Microscopy (SAM) with submicron spatial resolution

  • Ion Scattering Spectrometry (ISS) provides the ultimate in surface sensitivity

  • Motors on the specimen stage allow for the several different samples to be set up for spectra collection simultaneously

  • Vacuum or inert atmosphere specimen transfer vessel

  • New 06-350 sputter ion gun provides increased sputter etch rates and low voltage sputtering capabilities for thin film characterization

  • New dual beam charge neutralization technology provides "hands off" charge neutralization on electrically insulating samples


 

 

 

 

 

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